Cu2ZnSnS4 (CZTS) films were fabricated from a ceramic quaternary target, through middle frequency
magnetron sputtering. A post sulfurization process was applied for the sputtered films and sulfurization
temperatures ranging from 460 C to 580 C were utilized. It has been found that obvious Zn loss exists
during the sputtering, making the sputtered films become Zn poor although the target is Zn rich. The
sputtered films were not totally amorphous, but composed of small CZTS grains at the size of several
nanometers. After a post sulfurization process the crystallinity were greatly improved and films
composed of densely packed CZTS grains at the size of several hundred nanometers can be obtained at
sulfurization temperatures higher than 520 C. Yet minor SnS coexists with CZTS since the films were Zn
poor and Sn rich. And finally the CZTS films sulfurized at 580 C depict an optical band gap of around
1.55 eV.