Finally, I just received feedback from our factory…
We can provide the necessary hardware for creating SrTi03 and BiFe03 layers (UNIVEX with RF-sputtering and a substrate heater providing 800°C).
But we cannot give any guarantee on the process. If the enduser is looking for a tool including process setup then we have to stay away from offering this.
Following advice was given by our magnetron maker:
“The conditions you have below are reasonable however, I would caution you that because these films are finicky and will need allot of work to dial in I would be hesitant to offer any guarantee on the specific material properties if you can.”
Please ask your customer what they are expecting from us. Just hardware or hardware & process?