Figure 5. Dynamic stencil lithography for atomic calligraphy. (a) A dynamic stencil with an integrated shutter.
Both the stencil and the shutter are actuated using capacitive comb drives. The stencil is suspended over the
substrate by tethers connected to folded flexure springs. (Adapted from M. Imboden et al., Nano. Lett. 7, 3379,
2013.) (b) Schematic of atoms passing though the aperture as the stencil moves over the substrate. (c) An
array of identical patterns, written with gold on silicon nitride, produced using a stencil with 16 apertures,
each 200 nm in diameter. The fading contrast is a result of the apertures filling in with atoms.
Figure 5. Dynamic stencil lithography for atomic calligraphy. (a) A dynamic stencil with an integrated shutter.Both the stencil and the shutter are actuated using capacitive comb drives. The stencil is suspended over thesubstrate by tethers connected to folded flexure springs. (Adapted from M. Imboden et al., Nano. Lett. 7, 3379,2013.) (b) Schematic of atoms passing though the aperture as the stencil moves over the substrate. (c) Anarray of identical patterns, written with gold on silicon nitride, produced using a stencil with 16 apertures,each 200 nm in diameter. The fading contrast is a result of the apertures filling in with atoms.
การแปล กรุณารอสักครู่..