This study aimed to use a MEMS vibrational power generator to detect a bridge’s slab damage and pier scour. Eigenvalue analysis of a bridge slab and pier using FEM models, in which slab damage was modelled by a reduced Young’s modulus and pier scour was modelled by fixed boundaries of an inclined depth. In the eigenvalue analysis, the change in modal frequency and mode shape caused by the slab damage and pier scour consolidated the proposal of this present study.Utilizing a electrostatic vibration-based MEMS–MEH, the change in natural frequency and amplitude could be monitored by the change in the generated power. A power generation index to detect the deteriorated panel in a slab was proposed and its applicability was verified with the numerical models. As for detecting uneven pier scour, a reference-free method was proposed with a MEMS vibrational power generator installed at multiple points of equal height at the cap and monitoring unequal generated powers. When an unequal power generation distribution is found, it may indicate the uneven pier scour.The slab and pier models studied herein were simplified and the vibrations used to calculate the MEH generated energy were simply harmonic. The conclusions drawn above could apply only to the bridge types and damage patterns similar to those in this study. More complicated bridge types, models, and vibration patterns would help in generalizing the proposed methods.