Fig. 1 shows XRD spectra of as-deposited films as a function of power to the Cr target, i.e. for samples S1–S6. These spectra indicated planar spacings typical of the NaCltype
structure of CrN and ZrN. The films exhibited strong (111) preferred orientations, as compared to powder diffraction spectra, though other diffraction lines were also
observed and include (200) and (311).