High-resolution transmission electron microscopy (HRTEM) was performed to analyze the atomic structure of SiC. Fig. 7a shows an aggregate of particles of the nanometer order size. Fig. 7b shows an HRTEM image where it can be appreciated that the sample displays a high degree of crystallinity. Lattice spacing of 2.36 A˚ and 2.56 A˚ are observed, corresponding to the (101) and (111) planes with 2h = 38.2 and 2h = 35.6 of a-SiC and b-SiC phases respectively, (JCPDS 29-1126 and JCPDS 29-1129). The results of XRD are consistent with the electron diffraction pattern generated by the fast Fourier transform from HRTEM, FFT, spot diagram in Fig. 7c. The diffraction spots coincide with (400), (220) and (200) planes distances of 1.16 A˚ , 1.56 A˚ , and 2.07 A˚ , respectively, corresponding to the b-SiC pattern, and (103) plane distance of 1.46 A˚ , corresponding to a-SiC. This pattern also displays a distance close to 4 A˚ , corresponding to the interplanar spacing of silica for the (101) plane, equivalent to 2h = 22 (JCPDS 39-1425).