experiment configuration is approximately 75 nm outside the res-onance frequency peak. This value can be used as a reference valuefor all measurements as well.The detailed measurement results of PCD sample displacementchanges between 6.000 and 8.000 kHz with the step of 1 Hz forinterval of excitation voltages from 0.5 to 10.0 V (step 0.5 V) arepresented in Figs. 6 and 7.Fig. 7 shows that resonance frequencies for various amplitudesof excitation voltages that lie in the interval from 6.78 kHz to6.88 kHz. It is also clarified that the obtained resonance frequencyvalue is in compliance with PCD manufacturer catalogue value6.3 ± 0.6 kHz [30].The displacement changes of PCD as dependences on theexcitation voltage for selected frequencies over the resonance arepresented in Fig. 8 (blue and green dashed lines). The selectedFig