A torque sensor for rotatimg microsystems has to work
within measuring ranges down to some pNm or less. The
sensor to be presented has recently been developed by MTE,
Vienna. It is based on a very sensitive cross-shaped spring
element. The torque to be measured causes a torsional deformation
of this spring. For minimizing the influence of
the measurement procedure on the measuring object the
very small deformation of the spring element is detected
contactless by a laser triangulation system. ?he measuring
range is defined by the characteristics and dimensions of the
spring element.