Prior to assembly, silica nanoparticles with an average diameter 80 nm were prepared using the Stöber method, amino-functionalized silica nanoparticles (SiO2–NH2) were prepared by a silanization with 3-aminopropyltriethoxysilane (APTES), while carboxylic acid-functionalized silica nanoparticles (SiO2–COOH) were prepared by a ring opening linker elongation reaction of the amine functions with succinic anhydride, at the same time, amino-terminated silicon wafer (Si–NH2) was obtained by self-assembling 3-aminopropyltriethoxysilane, then one layer relative close-packed carboxylic acid-functionalized silica nanoparticles (SiO2–COOH) was arranged on silicon wafer through amidation reaction under DCC coupling agent.