The surface of Cr2N coating exhibits the distinctive cone-like structure with relatively uniform grain size and deeper grain boundary. While that of the CrN coating exhibits the cauliflower-like structure and the smallest grain size among the three PVD coating. Fig.4(a) shows the dense columnar microstructure of the Cr2N coating. Fid 4(b) is plane view TEM micrograph of Fig. 4(a, whith showe the columnar microstructure of about 20-40 nm in diameter with near circular shape. This columnar structure is apparent in Fig.3(c).