Also, P precipitations can enhance the crystallization rate and grain growth. P dopants act as donors and compensate for the p-type poly-Si film, which is formed by Al doping during the AIC process. The hole concentration of undoped poly-Si is reduced by approximately three orders to 7 × 1012 cm−3. Such near-neutral poly-Si films could be applied as intrinsic (i) layers in p-i-n structures to explore solar cell applications. Also, the enhanced quality of P-doped AIC-Si increases the mobility by five times owing to reduced scattering and trap density.