Group III-nitridesarenowactivelystudiedworldwideforsolar
cell applications.InGaNalloyshaveadirectbandgapfrom0.7to
3.4 eV,whichcoversmostofthevisiblespectrum.Thegrowthof
nanorods promisesapossibleimprovementinthequalityofthe
InGaN materialandthereforeoverrecentyearstherehasbeen
increasing interestinInGaNnanorodsresearchforLEDsandsolar
energy conversion [1–3].
NanorodsofGaN,InNandInGaNhavebeensuccessfullygrown
on differentsubstratesincludingSiandsapphirebyPlasma-
Assisted MolecularBeamEpitaxy(PA-MBE)andMetalOrganic
Chemical VapourDeposition(MOCVD) [1–3]. Ithasbeenestab-
lished thatGaNandInNnanorodscanbegrownbyPA-MBEunder
stronglyN-richgrowthconditions [1–3].
SeveralgroupshavedemonstratedthegrowthofGaNnanorods
by PA-MBEon(0001)sapphire [1–3]. TheGaNnanorodswere
found tobemostlyfreeofthreadingdislocations.Wehaveshown
that bychangingfromN-richtoGa-richMBEconditions,the
growthmodecanbechangedfromverticaltolateral,leadingto
growthofacontinuousGaNoverlayer [4]. Asaresultofgrowing
on thetopofthenanorods,manyofthethreadingdefectsare
eliminated, leadingtocoalescedGaNoverlayerswithaverage
threadingdislocationdensitiesuptotwoordersofmagnitude
lowerthanincontinuousGaNepilayers [4].
InN nanorodswerealsosuccessfullyachievedbyMBEand
MOCVD onSisubstratesbyseveralresearchgroups.However,it
wasevidentthatthebandalignmentisnotsuitableforthe
formation ofthep–n junctionsbetweenInNandSi [5–6]. The
conduction bandofInNisfoundtobebelowthevalencebandfor
Si, andthatmakesthismaterialcombinationnotidealfor
potentialdeviceapplications.
The problemofthebandalignmentcanbeovercomeby
growingInNonSiCsubstrates [7]. Thereisonlyonereportsofar
on thegrowthofInNnanowireson4H–SiC substratesbychemical
vapordepositionmethod [8]. However,tothebestofourknowledge,
therearenoknownpublicationsonInNnanorodsgrownbyMBEon
SiC substrates.
The aimofourresearchwastostudyPA-MBEgrowthofInN
nanorodson6H–SiC forpotentialsolarcellapplications.Wehave
also investigatedcoalescenceofInNnanorodsasawaytoimprove
the qualityofInNlayersgrownon6H–SiC substrates
กลุ่ม III-nitridesarenowactivelystudiedworldwideforsolarการใช้งานเซลล์ InGaNalloyshaveadirectbandgapfrom0.7to3.4 eV, whichcoversmostofthevisiblespectrum Thegrowthofnanorods promisesapossibleimprovementinthequalityoftheInGaN materialandthereforeoverrecentyearstherehasbeenเพิ่มขึ้น interestinInGaNnanorodsresearchforLEDsandsolarแปลงพลังงาน [1-3]NanorodsofGaN, InNandInGaNhavebeensuccessfullygrowndifferentsubstratesincludingSiandsapphirebyPlasma-ช่วย MolecularBeamEpitaxy(PA-MBE) andMetalOrganicสารเคมี VapourDeposition(MOCVD) [1-3] Ithasbeenestab-lished thatGaNandInNnanorodscanbegrownbyPA-MBEunderstronglyN-richgrowthconditions [1-3]SeveralgroupshavedemonstratedthegrowthofGaNnanorodsโดยแซฟไฟร์ PA MBEon (0001) [1-3] TheGaNnanorodswereพบ tobemostlyfreeofthreadingdislocations Wehaveshownที่ bychangingfromN-richtoGa-richMBEconditions,growthmodecanbechangedfromverticaltolateral, leadingtogrowthofacontinuousGaNoverlayer [4] Asaresultofgrowingใน thetopofthenanorods, manyofthethreadingdefectsareตัดออก leadingtocoalescedGaNoverlayerswithaveragethreadingdislocationdensitiesuptotwoordersofmagnitudelowerthanincontinuousGaNepilayers [4]อินน์ nanorodswerealsosuccessfullyachievedbyMBEandMOCVD onSisubstratesbyseveralresearchgroups.However,itwasevidentthatthebandalignmentisnotsuitablefortheก่อ ofthep – n junctionsbetweenInNandSi [5-6] การนำ bandofInNisfoundtobebelowthevalencebandforศรี andthatmakesthismaterialcombinationnotidealforpotentialdeviceapplicationsProblemofthebandalignmentcanbeovercomeby การgrowingInNonSiCsubstrates [7] Thereisonlyonereportsofarบน substratesbychemical thegrowthofInNnanowireson4H – SiCvapordepositionmethod [8] อย่างไรก็ตาม tothebestofourknowledgetherearenoknownpublicationsonInNnanorodsgrownbyMBEonเล่นพื้นผิวAimofourresearchwastostudyPA-MBEgrowthofInNnanorodson6H – SiC forpotentialsolarcellapplications Wehaveยัง investigatedcoalescenceofInNnanorodsasawaytoimproveพื้นผิว qualityofInNlayersgrownon6H – SiC
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