Figure options
Figure A.16.
Polishing characteristics of the GaN substrate with the bell-jar CMP system
Figure options
Various applications of recent information technology are supported by sophisticated device technology. With ongoing changes to technology, functional materials, including semiconductors, are needed to develop high-performance, intricate device technology, and the physical properties of the substrate material are becoming more important for maintaining technical advantages. In this chapter, the importance of sapphire, GaN, and diamond, which have recently gained attention as single-crystal materials for next-generation optoelectronics devices, is explained, and the processing of each material by chemical mechanical processing (CMP) is introduced.