Laser induced plasma spectroscopy is an effective tool to detect various transient species present in the above regions of the laser produced plasma from solid, liquid or gas. It is capable of performing measurement in any kind of matter [1]. In pulsed laser deposition, in presence of an inert or chemically active gas, the optical emission spectroscopy is widely used to diagnose the plasma plume [2], [3], [4] and [5], and it is suitable for performing the deposition process control. The solution of the processing control problem depends on the understanding of the basic physics and chemistry associated with laser-target and particle–particle interaction inside the laser induced plasma plume [6].