Plasma-polymerized PMMA films were obtained by a low-temperature ambient depositiontechnique using a floating-el ectrode DBD jet with two distinct operation modes, namely adiffuse mode and a concentrated mode. Deposition rates, surface morphologies, atomiccompositio ns, and chemical bond concentrations of the PMMA films showed a dependenceon the modes. In the concentrated mode rapid deposition (22 nm s1) can be achieved withthe substrate temperature merely rising to 39 8 C. Besides transparent PMMA films with highquality, opaque films with wrinkled microstructures due to buckling effects were obtained.Similar functional groups to those in purePMMA were also observed by both XPS andFTIR results. It was demonstrated thatPMMA films can be successfully grownon different substrate materials, such asglass, plastic, rubber, oni on skin, and fin-gernail