We found that by doping with Zn in copper oxide films, their gas response to ethanol vapour can be decreased, but faster response and recovery times can be realized. In case of TA annealed samples,the time constants were decreased to d1∼ 0.46 s and d2∼ 9.4 s,and for RTA treated samples to d1∼ 0.38 s and d2∼ 9.7 s.