1. Introduction
In recentyears,materialsabsorbingelectromagneticwave
(EMW) haveattractedworldwideattentionasaresultofthe
developmentofradar-absorbingtechnology [1]. Siliconcar-
bide (SiC)ceramicisagoodselectiontofabricateEMW
absorptionmaterialsbecauseofitswidebandgapandpractical
applicationsinsevereenvironments.However,ithasbeen
demonstratedthatthelowelectricalconductivityofpureSiC
results inlowdielectricloss [2], suchasSiCpowders [3], SiC
foams [4], andSiCmatrixcomposites [5]. Inourprevious
work [6], porousSi3N4–SiC compositeceramicswith11vol%
SiC wasfabricated,whichachievedaminimumreflectionloss
of 6.7 dBat12.2GHz.Nonetheless,thedielectricproperties
of CVISiCalsoneedtobeimproved.
Changing theconductivityofSiCbydopingisaneffective
way toimproveitsdielectricproperties [7]. Itwasreportedthat
1. บทนำใน recentyears, materialsabsorbingelectromagneticwaveHaveattractedworldwideattentionasaresultofthe (EMW)developmentofradar-absorbingtechnology [1] Siliconcar-bide ceramicisagoodselectiontofabricateEMW (SiC)absorptionmaterialsbecauseofitswidebandgapandpracticalapplicationsinsevereenvironmentsอย่างไรก็ตาม ithasbeendemonstratedthatthelowelectricalconductivityofpureSiCผล inlowdielectricloss [2], suchasSiCpowders [3], SiCโฟม [4], andSiCmatrixcomposites [5] Inourpreviousงาน [6], porousSi3N4 – SiC compositeceramicswith11vol %ซิลิก้อน wasfabricated, whichachievedaminimumreflectionlossของ 6.7 dBat12.2GHz.Nonetheless, thedielectricpropertiesของ CVISiCalsoneedtobeimprovedเปลี่ยน theconductivityofSiCbydopingisaneffectiveวิธี toimproveitsdielectricproperties [7] Itwasreportedthat
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1. Introduction
In recentyears,materialsabsorbingelectromagneticwave
(EMW) haveattractedworldwideattentionasaresultofthe
developmentofradar-absorbingtechnology [1]. Siliconcar-
bide (SiC)ceramicisagoodselectiontofabricateEMW
absorptionmaterialsbecauseofitswidebandgapandpractical
applicationsinsevereenvironments.However,ithasbeen
demonstratedthatthelowelectricalconductivityofpureSiC
ผล inlowdielectricloss [ 2 ] , [ 3 ] suchassicpowders เพียง
โฟม [ 4 ] , andsicmatrixcomposites [ 5 ]
งาน inourprevious [ 6 ] , poroussi3n4 – SIC compositeceramicswith11vol %
ของ SIC wasfabricated whichachievedaminimumreflectionloss , 6.7 dbat12.2ghz อย่างไรก็ตาม thedielectricproperties
เปลี่ยน theconductivityofsicbydopingisaneffective ของ cvisicalsoneedtobeimproved .วิธี toimproveitsdielectricproperties [ 7 ] itwasreportedthat
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