Fig. 2. Nanowire devices and device array. (A) Optical image of the upper
portion of a device array. White lines correspond to metal electrodes that
connect to individual nanowire devices. The position of the microfluidic
channel used to deliver sample is highlighted in blue and has a total size of 6
mm 500 m, length width. The image field is 4.4 3.5 mm. (B) Optical
image of one row of addressable device elements from the region highlighted
by the red-dashed box in A. The red arrow highlights the position of a device.
The image field is 500 400 m. (C) Scanning electron microscopy image of
one silicon nanowire device. The electrode contacts are visible at the upper
right and lower left regions of the image. (Scale bar: 500 nm.) (Inset) Crosssectional
schematic of a single silicon nanowire device. The nanowire (orange
horizontal line) is connected at its ends by source (S) and drain (D) metal
electrodes (gold), and metal is insulated with a layer of silicon nitride (green).
The microfluidic channel is indicated (blue).