For the sample deposited with the highest reactive gas
flow (15 sccm), there is a stabilization of the non-metal to metal
atomic ratio. When compared to the sample produced with a 14 sccm flow, a substantial increase in the oxygen content, is
observed compared to samples prepared with lower gas flow.
This evolution, observed for higher flow rates, with an abrupt
increase in the oxygen content when the non-metal to metal
atomic ratio is kept almost constant, suggests a change in the
structural arrangement of the coatings, as we will discuss in this
paper