Due to their high biostability, TiN layers may also be used as electrodes in bioelectronic applications [7] like in intelligent implants or in-vivo biosensors that have to withstand the severe corrosion caused by the body fluid. TiN electrodes have already been applied in the subretinal prosthesis project [8] as well as in biomedical microelectromechanical systems (BioMEMS).[9]