This experiment showed that sputtering technology of ZnO:Ga thin films at different positions against a substrate holder have significant impact on electrical properties of the films, namely resistivity, which has decreased about one order of magnitude at tilt-angle 80o against zero tilt-angle.
No significant changes were observed in case of optical properties of the films in dependence on the tilt-angle. Deposition temperature at each tilt-angle has only slight influence on the all investigated physical properties.