Furthermore, by comparing the evolution of the diffraction data of the oxynitride films prepared with low gas flows (from 6 to 8 sccm), it is possible to observe some texture change, decreasing the dominant growth to approximately randomly oriented crystals, with the fcc-ZrN structure. This change could be associated with the increase of nitrogen content of the sub-stoichiometric fcc-ZrN structures (see Table 1).