The semi-transparent sample, deposited with 15 sccm, shows a significant increase of the oxygen content along with a significant decrease of the nitrogen and its stoichiometry could correspond to an oxynitride-type structure. However, the exact determination of the crystalline structure is again very difficult due the reduced number of visible diffraction peaks. Nevertheless, and according to very few research studies[19–22] the diffraction peaks located at 2θ≈21.1°, 2θ≈30° and 2θ≈32.9° could correspond to a bcc γ-Zr2ON2- type structure (ICDD card n° 48-1635) [23].