Opportunities existed to detect the root cause for the issue that the noise from High Process Vacuum pump exceed the standard of Ministry of Industry, please pay attention to the capacity of vacuum pump, whether the capacity can meet the requirement of production, as comparing the operation data record of HPV 1-1 (June 2010 vs. Aug 2011),the frequency HZ from 32HZ to 49HZ, while the current from increase from 40A to 65A, it means that the Vacuum pump is on the fully operation, it may cause the increase of the noise.