2.5.1. Maximum indentation depth: 20 µm (larger depths on request)
2.5.2. Theoretical displacement resolution: 0.002 nm
2.5.3. Typical displacement noise floor: 0.3 nm
2.6. Thermal drift: 0.004 nm/s or better.
2.7. User definable contact load, useful for testing rough surfaces.
2.8. Fused silica and tungsten reference samples for instrument performance monitoring.