Amorphous and microcrystalline silicon thin films can be deposited and doped economically by RF-PECVD. These films form the light-absorbing layers of an amorphous silicon solar cell or a tandem silicon cell (amorphous + microcrystalline). We offer custom-designed RF-PECVD systems intended for use in manufacturing either type of solar cell. Tystar's standard RF-PECVD system for amorphous solar cells is configured as a cluster of four process chambers. It is designed for processing substrates up to 12"/300 mm square. square. Chambers may be loaded either manually or automatically. automatically. The system comes with a FCS-10/30 process controller and a DCS 30 data