Observed data found 2 CHUNKs of NRM wafer showed narrow WPE that contributed to ET yield. If exclude this CHUNK, ET yield is around 98.21% that showed comparable to baseline.
Observed data found 2 CHUNKs of NRM wafer showed narrow WPE that contributed to ET yield.If exclude this CHUNK, ET yield is around 98.21% that showed comparable to baseline.