In this paper, a fabrication process of a large nanostructure area
is introduced and the obtained structures are characterized utilizing
SEM stereoscopic technique. The characterization involves 3Dreconstruction
of nanostructures and surface property calculation.
The nanostructures are created by self-assembling a highly ordered
monolayer of nanospheres as optical lenses over photoresist to
produce deep ordered nano-patterns. Evaluation of these nanostructures
is an essential step since the geometry of the primary
template affects entire subsequence processes