Electrospraying utilises electrical forces for liquid atomisation. Droplets obtained by this
method are highly charged, to about half of the Rayleigh limit. The advantage of
electrospraying is that the droplets can be extremely small, down to the order of 10's
nanometers, and the charge and size of the droplets can be controlled to some extent by
electrical means. The application of electrospray technology for thin solid film devices is
reviewed in this chapter. The review is focused on thin inorganic film depositing for solar
cells, fuel cells, lithium batteries, supercapacitors, and gas sensors production. All the details
of the available technical data regarding the thin film deposition process are summarized in
the tables.