A texturedsiliconseedlayeronaglasssubstratewasgrown
from anAl–Si eutecticmeltlayerat725 °C viae-beamevaporation.
A smooth,thin,and flexibleglasswitharelativelyelevatedglass
transition temperaturewasusedasthesubstratematerialforthis
investigation.Priorto film deposition,theglasssubstrateswere
cleaned bythestandardRCAprocedureanddippedina2%HF-
solution for30s(GORKA).Aluminumpellets(99.999%inpurity,
KurtJLesker)andsiliconpellets(99.999%inpurity,KurtJLesker)
wereusedasthethermalevaporatorande-beamevaporator
materialsources,respectively.Usingathermalevaporator,Allay-
ers varyingfrom30to100nminthicknessweredepositedonto
glass substratesundermoderatevacuumconditionsof105 Torr.
The samplewasremovedfromthethermalevaporator,placedinto
the electronbeamevaporatorandtakentobasevacuumlevelsof
107 Torr.ASi film of200nmthickwassubsequentlydeposited
onto theAlbaselayerwhilethesubstratewasheldat725 °C. The
deposition rateofSiwasheldconstantat6nm/min.Thicknesses
weretakenfromaquartzcrystalmicrobalance(QCM)reading