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Junction Defect Detection (cont.)-
Fig.2 depicts the sensitivity of the EBIC technique.
The EBIC image reveals the location of EOS
damage on an input protection diode. A closer look
of the image reveals a replica of crystallographic
damage, which occurred during thermal runaway. A
current filament formed in the high ohmic P- silicon,
and current spreading at the transition point of the
low ohmic N+ substrate.