shows the high-resolution TEM and
SAED pattern of the CrN coating. The discrete (111), (200), (220) and
(113) diffraction spots were observed in the selected-area electron
diffraction (SAED) pattern. Combined with the XRD and the SAED
pattern, it can be concluded that the CrN coating consists of a CrN
phase with a cubic crystal system and a Cr2N phase with a trigonal
system. As shown in Fig. 4b, when the C2H2 flow rate increased to
10 sccm, the discrete (151) diffraction spots were observed in the
selected-area electron diffraction (SAED) pattern, which corresponding
to the XRD analysis. It is significantly that the coating was composed
by crystalline and amorphous region. These indicated that the CrCN
coating exhibits a nanocystallite/amorphous microstructure. Similar
results are observed in Fig. 4c and d. Fig. 4c also shows that a twinning
structure that consists of (200) planes of the CrN phase, which plays
an important role in hindering of the movement of dislocations and
improving the toughness of the coating [37]. It is worth to mention
that the grain size decreased with the increase of C2H2 flow rates from
0 to 10 sccm, whereas, it was contrary when the C2H2 flow rates
increased to the high level. The grain size is a key factor to affect the
performances of coating [20].
shows the high-resolution TEM andSAED pattern of the CrN coating. The discrete (111), (200), (220) and(113) diffraction spots were observed in the selected-area electrondiffraction (SAED) pattern. Combined with the XRD and the SAEDpattern, it can be concluded that the CrN coating consists of a CrNphase with a cubic crystal system and a Cr2N phase with a trigonalsystem. As shown in Fig. 4b, when the C2H2 flow rate increased to10 sccm, the discrete (151) diffraction spots were observed in theselected-area electron diffraction (SAED) pattern, which correspondingto the XRD analysis. It is significantly that the coating was composedby crystalline and amorphous region. These indicated that the CrCNcoating exhibits a nanocystallite/amorphous microstructure. Similarresults are observed in Fig. 4c and d. Fig. 4c also shows that a twinningstructure that consists of (200) planes of the CrN phase, which playsan important role in hindering of the movement of dislocations andimproving the toughness of the coating [37]. It is worth to mentionthat the grain size decreased with the increase of C2H2 flow rates from0 to 10 sccm, whereas, it was contrary when the C2H2 flow ratesincreased to the high level. The grain size is a key factor to affect theperformances of coating [20].
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