The XRD analysis, on the other hand, acquires information at larger depth than XPS,
and is less crucial to the change of surface condition.
In certain extent, surface cleanliness,
then, is not the primary concern in XRD, but still, air exposure period between sample preparation and characterisation should be kept as short as possible to minimise the surface interference effect such as the surface
oxide formation. Some characterised patterns of silicide thin films are tabulated in Table 2.
The XRD analysis, on the other hand, acquires information at larger depth than XPS, and is less crucial to the change of surface condition. In certain extent, surface cleanliness,then, is not the primary concern in XRD, but still, air exposure period between sample preparation and characterisation should be kept as short as possible to minimise the surface interference effect such as the surfaceoxide formation. Some characterised patterns of silicide thin films are tabulated in Table 2.
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