Fig. 4. Figures from top to bottom: (a) thickness map (in Å), (b) orientation map (in °), (c) and orientation map profiles. (a) and (b) In places where the highest intensity of the rocking curve was below a threshold of 40 counts, the thickness and orientation were set to zero in order to enhance the visibility of the Si fins, and because thickness and orientation outside the crystalline area are meaningless, of course. (c) The orientation map profiles extracted from individual Si fins were averaged over a width of 10 nm. The color scheme of the plots corresponds to the colored dots shown in (b). (For interpretation of the references to color in this figure caption, the reader is referred to the web version of this article.)