The Cu2O and CuO thin films were successfully synthesized on
glass and ITO substrates by vacuum thermal evaporation of Cu
followed by thermal oxidation under controlled conditions. It was
found that the properties of Cu2O films have optical properties that
are suitable for solar cells and other optoelectronic devices. Singlelayer
and multilayer-films could be fabricated by choosing the
processing sequence. The present technique provides many
advantages over other methods available for synthesize copper
oxide films, such as the formation of phase-pure Cu2O films,
capability of relatively thick films formation, and high throughput
of the process. Authors believe that the present method can have
some technical benefits for large-area coating requirements of
device quality Cu2O and CuO films.