40-nm-thick Au and 20-nm-thick Cu layers were deposited
on n-type floating-zone (FZ) Si(001) wafers at room
temperature in vacuum (<5x10e-6 Torr) atmosphere. For the
Si(001) wafer without metal layer, a 20-nm-thick
(100)-oriented β-FeSi2 template was prepared at 743K by the
reactive deposition epitaxy (RDE) method. The details of the RDE method were already described in a previous paper [4].
การแปล กรุณารอสักครู่..
