Field emission scanning electron microscopy (FE-SEM) was per- formed by a JEOL JSM-7600F for the analyses of cross-section surface features and morphological investigations. The surface compression stress of the ion-exchanged glass before and after deposition was measured by surface stress meter FSM-6000LE, which is a standard optical method based on the photoelastic properties of the glass. Studying specific molecular vibrations associated with the structural modifica- tions in the superficial region was induced due to the diffusion during the deposition, micro-Raman spectra were taken at room temperature by using a Labram HR800 micro-Raman spectroscopy in the 450– 1250 nm range with a step-size of 2 nm. For excitation, the 514.5 nm line from a mixed Ar-Kr ion gas laser was used. The laser beam was focused onto the cross section of a cut sample near the surface region and the scattered radiation from this region was recorded with a Peltiercooled CCD camera. A 100× microscope objective (N.A. = 0.9) was used to excite and collect the Raman spectra. The laser power on the sample cross section was kept below 5 mW in our measurements.