A Compliance Verification Plan shall be established to ensure the Organization’s fulfillment of the
technical requirements of the ESD Control Program Plan. Process monitoring (measurements)
shall be conducted in accordance with a Compliance Verification Plan that identifies the technical
requirements to be verified, the measurement limits and the frequency at which those
verifications shall occur. The Compliance Verification Plan shall document the test methods and
equipment used for process monitoring and measurements. If the test methods used by the
Organization differ from any of the standards referenced in this document, then there must be a
tailoring statement that is documented as part ofthe ESD Control Program Plan. Compliance
verification records shall be established and maintained to provide evidence of conformity to the
technical requirements. The test equipment se