Thin Film Deposition
Thin Film Deposition can be achieved through two methods: Physical Vapour Deposition (PVD) or
Chemical Vapour Deposition (CVD)
Physical Vapor Deposition (PVD) comprises a group of surface coating technologies used for decorative
coating, tool coating, and other equipment coating applications. It is fundamentally a vaporization
coating process in which the basic mechanism is an atom by atom transfer of material from the solid
phase to the vapor phase and back to the solid phase, gradually building a film on the surface to be
coated. In the case of reactive deposition, the depositing material reacts with a gaseous environment
of co-deposited material to form a film of compound material, such as a nitride, oxide, carbide or
carbonitride.