Elastic spring Material: nickel and gold R = 90 m; H = 30 m; B = 60 m; L = 100 m; n = 5
Floating plate Material: nickel and gold D = 3.6 mm; thickness: 29.8 m Ni and 0.2 m Au
Fixed plate Material: nickel and gold Thickness: 4.8 m Ni and 0.2 m Au
Gap Medium: air Space: 10 m
Stylus Material: tungsten carbide Ds = 1 mm; Ls = 6.8 mm; ML = 2.3 mm; ds = 0.2 mm
Probing sphere Material: ruby d = 300 m
(d) 4.8