It is shown thatfundamentalparameter based quanttfication is a versatile way of extracting
analytical resultsporn XRF measurements. For thick, bulk materials two sofiarepackage are
available which yield similar results. Only one of them is also capable of coping with stacks of
layers of unknown thickness. Resultsfor a number of sputtered layers are compared with ICP-AES
data and the agreement is found excellent,