Production technology such as production tools, methods and processes for thin-film lithium secondary battery will be introduced. Thin-film lithium secondary batteries that are produced by thin-film deposition technology have special advantages thanks to their unique thin-film shape. They are not only safe to use as a result of their being allsolid-state, but are also thin, lightweight and flexible. They can be employed in small electronic devices and biomedical device. If thin-film lithium secondary batteries are mass-produced for the market, their demand will increase rapidly, thereby accelerating market expansion. If we can establish and provide a mass-production technology for thin-film lithium secondary