between the resonance and antiresonance frequencies is, the larger the electromechanical coupling factor.The energy loss during the operation of an electromechanical system is of great concern in device fabrication, as the loss brings about reliability issues due to self-heating of the material.125 Generally, both dielectric and mechanical dissipation must beconsidered. The former is important when the device operates at off-resonance frequencies, while the latter is critical when thematerial is driven in resonance modes. The mechanical qual-ity factor is inversely proportional to the difference between antiresonance and resonance frequencies. Hence, it is commonly considered that the enhancement of this property is achieved atthe expense of the electromechanical coupling factor. Quartz thus exhibits a coupling coefficient of about 0.1 and Qmup to106while donor doped PZT exhibits a coupling coefficient of0.5–0.7 and a Qmon the order of 102.1265.2. Figures