Availability of TCAD softwares has made possible
accurate multidimensional simulation of realistic device
structures and processes. Advanced set of TCAD tools is
available from universities and from TCAD vendors.
Commercial TCAD vendors (Silvaco and Synopsys) provide
an excellent collection of TCAD suites. Commercial TCAD
tools may be used to show students the link between physical
and electrical simulation through the mixed TCAD and
electrical simulation abilities of Silvaco and Synopsys tools.
Advanced TCAD suites include process simulation, device
simulation, compact models parameter extraction and circuit
simulation suites, interconnect simulation, and optimization to
other technology CAD requirements. However, the use and
maintenance of coupled TCAD tools becomes difficult and
requires a significant level of user experience. Historically, all
the TCAD tools developed were available on various UNIXbased
platforms. Attempts have also been made for Windows
versions of TCAD tools, but the use of Windows versions are
very limited, as the software packages are distributed and
supported by third-party vendors. Current TCAD tools
accelerate advanced technology development with Process and
Device modeling capabilities.