Production of low electron temperature ECR plasma
Y. Kawai
*
, N. Itagaki, M. Koga, H. Muta
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga-koen 6-1, Kasuga, Fukuoka 816-8580, Japan
Production of low electron temperature ECR plasma
Y. Kawai
*
, N. Itagaki, M. Koga, H. Muta
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga-koen 6-1, Kasuga, Fukuoka 816-8580, Japan
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