Aluminum doped zinc oxide (AZO) thin films have been prepared on the glass substrates
(Corning 1737) by sol-gel dip-coating method employing zinc acetate and aluminum chloride
hexahydrate for the transparent conducting oxide (TCO) applications. 1 at% Al was doped to the ZnO
thin films. The effects of post-heating temperature on the crystallization, optical and electrical
properties of the AZO films have been investigated. Experimental results showed that post-heating
temperature affected the microstructure, electrical resistance, and optical transmittance of the AZO
films. From the X-ray diffraction analysis, all films have hexagonal wurtzite crystal structure. Optical
transmittance spectra of the AZO films exhibited transmittance higher than about 80% within the
visible wavelength region and the optical direct band gap (Eg) of these films was increased with
increasing post-heating temperature. A minimum resistivity of 2.5×10
-3
Ω cm was observed at 650 °C