Deposition of MgO thin film on nanocrystalline yttria-stabilized zirconia microtubes was investigated. The
microtubes were prepared by self-formation from threads drawn directly from zirconium butoxide [Zr(OBu)4]
precursor and heat treated at 800 °C. The tubes possessed 100% tetragonal phase, their typical outer diameter
was 50 μm, inner diameter 30 μmand length 1 cm.MgO films were deposited fromβ-diketonate-type precursor
2,2,6,6-tetramethyl-heptanedionato-3,5-magnesium(II) at 220 °C by atomic layer deposition. Thickness of MgO
film on microtubes was 15.8 nm and growth rate 0.105 Å/cycle.