2.2. Reactor modeling approach
A 2D-axisymmetric model is used to study the Ar/C2H2transport species. The assumptions of the model include: laminar
and incompressible flow; system formed by Ar and C2H2with
no reactions involved; kinetic theory used to solve the species
diffusion. The presence of the substrate is ignored in order to
simplify the model as it has almost no effect on the flow patterns within the reactor. The decomposition of the C2H2 is
also not considered as the chemistry of the reaction species
is not the scope of this study. With these assumptions the
model solves mass, momentum, energy and species transport. The model is applied to the 2D-axisymmetric representation of the CVD oven shown inFig. 1where L1 is the probe
injection length, L2 is the length of the heated wall, L3 is the
total length of the quartz tube.