That is, the decreased mobility at 200C is attributed to increase ofsurface bonding.Therefore,the change of oxygen-vacancy and surface bonding is coincided with the behavior of carrier concentration and mobility. Generally, many researcher have been reported that the deposition of higher substrate temperature improve the crystallinity and the resistivity of film [25,15]. That is, despite of decrease of oxygen vacancy, the carrier concentration increases due to increase in Al content, indicating that the Al content is main parameter in change of the carrier concentration. However, in our case, the crystallinity of AZO film is improved but the resistivity is degraded with increasing the substrate temperature. In order to confirm the root cause of this difference, we analyzed the Al content in AZO thin film, shown in Fig. 5.