shows
the three-point bending configuration of the Nano-
UTM, and Fig. 6(b) shows a magnified view near the
specimen. The span length between the lower contact
points was 1.09 mm. The width of the specimen was
137 lm and the thickness was 57 lm. The maximum loading
distance of the upper fixture was 2 mm. The test was
carried out in load-controlled mode. Static bending tests
were performed at 0.5 mN/s until failure. The static fracture
load when the clogged layer was uppermost was generally
larger than when lowermost. This can be explained
from the geometry of the clogged layer and crack propagation
under tensile loading. During the bending test,
when the clogged layer was lowermost, the clogged layer